Talk title: AI-assisted Models in Laser Technology for Semiconductor Industry
The rapid advancement of semiconductor manufacturing has increased the demand for efficient wafer recycling and reliable laser thin-film stripping. However, experimental optimization is costly and time-consuming, while purely simulation-based prediction often suffers from systematic errors. This study proposes a hybrid simulation–experiment AI framework for process prediction and process-window analysis of nanosecond laser stripping of dielectric thin films on silicon wafers.
Si₃N₄/Si and SiO₂/Si are selected as representative dielectric film systems. A FLOW-3D simulation model is first established to generate data over different laser powers and scanning speeds using a reduced-mesh thin-film representation for improved computational efficiency. The simulated data are used to train a multilayer perceptron (MLP) model, and limited experimental data are incorporated through Ridge regression-based residual learning to correct simulation errors.
The framework simultaneously predicts processing depth and surface roughness to evaluate both stripping effectiveness and surface quality. Hybrid prediction results are used to construct process maps for the two dielectric systems, whose overlap identifies a common processing window satisfying both material requirements. The results demonstrate that the proposed hybrid AI framework improves prediction reliability while significantly reducing experimental effort. Moreover, the proposed simulation–experiment learning strategy is general and can be readily extended to other semiconductor laser manufacturing processes, including laser drilling, laser bonding, laser cutting, and related laser micromachining applications.
Speaker:
Yu-Lung Lo received his B.S. degree from National Cheng Kung University (NCKU), Tainan, Taiwan, and his M.S. and Ph.D. in Mechanical Engineering from the University of Maryland, College Park, USA. He has been a faculty member of the Mechanical Engineering Department at NCKU since 1996, where he is now a University Chair professor and Vice Dean of the College of Engineering/Academy of Innovative Semiconductor and Sustainable Manufacturing. He was the Director of the Instrument Development Center and Chairman of the Department of Mechanical Engineering at NCKU. He was also a visiting scientist at the University of Michigan, Ann Arbor, USA.
Dr. Lo received the ASE Chair Professor and Micron Technology Chair Professor in 2024; the Research Excellence Award from the Ministry of Science and Technology (MOST) in Taiwan, 2018/2021; Fellow of the Chinese Society of Mechanical Engineers (CSME) in Taiwan 2019; Fellow of the Society for Experimental Mechanics (SEM) in USA 2018; and ASE Scholar in Research Excellence in Taiwan 2017. Also, he received the Outstanding Professor Award from the CSME in Taiwan in 2013, the First-Class Research Award from the National Science Council (NSC) in 2005/2006, and the Dr. Ta-You Wu Award for Young Researchers from the NSC in 2002.
He was invited to serve as a keynote and plenary speaker at international conferences on optics and 3D additive manufacturing, and he also organized and chaired sections of these conferences, especially as General Chair of the International Symposium on Optomechatronic Technology in 2017. Now, he is the Chairman of the Asian Society of Experimental Mechanics (ASEM) and an Executive Council member of the American Society of Mechanical Engineers (ASME), Taiwan Section.
His research interests include biophotonics, 3D additive manufacturing, laser machining, and 3D System-in-Package (SiP) technologies. He has authored over 190 journal publications and has filed for several patents. One of his articles was included in the 2015 Spotlight on Optics by OSA. He is included in the Analysis of Stanford University’s Top 2% Scientists (Career Impact) (1960 - 2025) and Top 2% Scientists in 2021-2025. Also, he is on the list of Top Scholars and Highly Ranked Scholars at Sensor from ScholarGPS.
Talk title: Phase Analysis Methods and Device Development for Optical Metrology
Phase analysis is a powerful tool in optical metrology and has been widely applied to displacement, strain, shape, and vibration measurements. This presentation introduces phase analysis methods and measurement devices developed for optical metrology.
Several phase-based measurement techniques are presented, including the sampling moiré method, interferometric phase-shifting methods, and image-based three-dimensional shape measurement. Measurement devices developed to improve measurement accuracy, speed, and practicality are also described, including a line-LED projector combined with a cylindrical lens array for three-dimensional shape measurement, a nanometer-scale phase-shifting device for laser interferometry, and imaging systems with embedded phase-processing capability.
Applications of these technologies to industrial inspection, structural health monitoring of civil infrastructure, deformation and vibration measurement of space structures, and plant monitoring for smart agriculture are introduced. The combination of phase analysis algorithms and measurement device development has enabled advanced optical metrology systems for a wide range of engineering, scientific, and agricultural applications.
Speaker:
Prof. Motoharu Fujigaki received his BE and ME degrees in mechanical engineering from Osaka University in 1990 and 1992, respectively. He received his doctoral degree from Osaka University in 2001. He was working in NABCO Ltd. from 1992 to 1995. He moved to Department of Opto-Mechatronics, Faculty of Systems Engineering, Wakayama University in 1995 as a research associate. He became an associate professor in 2003. He moved to Human and Artificial Intelligent Systems, Graduate School of Engineering, University of Fukui as a full professor in 2015. He is interested in optical metrology using image processing, especially 3D shape measurement using gating projection method, deformation measurement using phase analysis method used for structural health monitoring and small displacement and strain distribution measurement using laser interferometry. He is spending much effort to apply his proposed methods and technologies to the practical industrial field. He is an executive board member of The Japanese Society for Experimental Mechanics (JSEM), and a steering committee member of Asian Society of Experimental Mechanics (ASEM).
Talk title: Carbon Fiber Composite Honeycomb Materials: Fabrication, modeling and Mechanics
Reducing structural weight, enhancing load-bearing efficiency, and ensuring surface accuracy are the design objectives for spacecraft exploration structures. In the space environment, as satellites continually pass through shaded and illuminated regions, the reflective surfaces of satellite antennas undergo significant thermal deformation, thereby reducing the satellite's detection capabilities. Carbon fiber honeycomb structures, characterized by their lightweight, high specific stiffness, high specific strength, and low thermal expansion coefficient, have important applications in advanced spacecraft components such as satellite antenna reflective surfaces, space telescopes, and high-precision optical support platforms. In this report, we will present some of the progress made by our research group in the field of carbon fiber composite honeycomb structures, including: (1) manufacturing techniques for carbon fiber honeycombs; (2) mechanical performance characterization and evaluation methods for carbon fiber honeycomb sandwich structures under typical loads; (3) design, mechanical performance evaluation, and reinforcement mechanism study of face-core reinforced carbon fiber honeycomb structures; (4) surface adaptability design and mechanical performance characterization of carbon fiber honeycomb structures.
Speaker:
Jian Xiong is a tenured professor at Harbin Institute of Technology. He currently serves as the director of Structural Lightweighting and Composites Laboratory (StruCM Lab), Deputy Director of the National Key Laboratory of Science and Technology on Advanced Composites in Special Environments, and Chairman of the Heilongjiang Youth Science and Technology Association.
In 2012, He obtained a doctoral degree from Harbin Institute of Technology, China, then worked as Humboldt Research Fellow in Siegen University, Germany from 2015.04 to 2016.08, and visiting scholar in Northeastern University, U.S (2011.01-2012.01), Siegen University, Germany (2013.09-2013.12), HongKong Polytechnic University(2017.12-2018.01) and National University of Singapore (2024.07).
He is mainly engaged in scientific research and teaching in the field of mechanics of composite materials and structures. Ultra-lightweight and high-strength have always been significant challenges in the development of aerospace structures. He is dedicated to researching high-strength design methods and mechanical properties of carbon fiber composite sandwich structures: designing novel composite lattice/folded core materials with exceptional specific strength; significantly enhancing the face-core interface properties of these novel composite sandwich structures; and establishing theoretical models for the mechanical properties of these structures. He has published more than 160 Journal and conference papers. These papers have been cited more than 6000 times, including citations from academicians from the United States, the United Kingdom, Europe, Germany, Japan, Russia, Australia, Korea, India, China, etc., as well as Airbus and NASA. Professor Atluri from the United States praised the work for filling gaps in the material selection map for mechanical properties, and Professor Shukla and others have included it in 20 English books. Twenty-four authorized invention patents have been granted.